Experiments were conducted on various material substrates at various input parameter levels, and particle removal efficiencies were quantified using laser particle counters.
Problem Statement
Particle removal efficiency of ultrasonic and megasonic systems as a function of various input parameters ()frequency, power level, etc.) has never been systematically studied.
Outcome of the Research
Correlation was established between particle removal efficiency and ultrasonic/ megasonic field parameters for various substrates and particle sizes.