Industrial Consultancy & Sponsored Research (IC&SR) , IIT Madras
Apparatus for varying resonant frequency in a multi-frequency radio frequency (RF) Micro-Electro-Mechanical System (MEMS) switch
Categories for this Invention
Technology:; Apparatus for varying resonant frequency in a multi-frequency RF Micro-Electro-Mechanical System (MEMS) switch
Industry/Application: RF MEMS Switch, ESDM;
Market: The global RF MEMS market is projected to reach at a CAGR of 13.08% during the period (2024-32).
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Problem Statement
- The problem statement discussed in the present invention is how to vary resonant frequency in a radio frequency (RF) MEMS capacitive switch.
- Hence, subject invention addresses the issue.
Technology
- Present patent describes an apparatus for varying resonant frequency in a multi-frequency radio frequency (RF) Micro-Electro-Mechanical System (MEMS) capacitive switch. (Refer Fig.1 & Fig. 2)
- The apparatus includes a multi-frequency RF MEMS capacitive switch, a plurality of floating metals spaced uniformly in the multi frequency RF MEMS capacitive switch, a lateral thermal actuator, a push-pull beam with a contact arm and a plane tip or a T-shaped tip and a buckling actuator.
- The buckling actuator, the push-pull beam and the lateral thermal actuator are in the same horizontal plane in the initial state (ON –state of the switch).
- Further, a first (1st) direct current (DC) voltage is applied to the lateral thermal actuator and a second (2nd) DC voltage is applied to the buckling actuator.
- The buckling actuator buckles upward from a first (1st) position to a 2nd position when the second (2nd) DC voltage is applied to the buckling actuator.
- The push-pull beam is pushed laterally by the lateral thermal actuator towards the plurality of floating metals when the 1st DC voltage is applied to the lateral thermal actuator.
- The voltages can be applied to the buckling actuator and the lateral thermal actuator at the same time or at different times.
- The former case, the distance of separation between the buckling actuator and the push-pull beam and the 1st & 2nd voltages to be applied on them are optimized so as to assure that the buckling actuator has moved upward displacing itself from the path of the push-pull beam.
- The latter case, the distance of separation and the voltages are not time-dependent, unlike the former case.
- Moreover, each of the floating metal is segmented.
Key Features / Value Proposition
- The proposed method facilitates a plurality of floating metals spaced uniformly in the multi-frequency RF MEMS capacitive switch.
- Provide the RF MEMS capacitive switch with a lateral thermal actuator, a push-pull beam with a contact arm and a buckling actuator to vary the resonant frequency of the RF MEMS capacitive switch.
- Based on a position of the push-pull beam over the plurality of
- floating metals, the resonant frequency of RF MEMS capacitive switch is varying,
- Position of the push pull beam over the plurality of floating metals is varied by varying said first DC voltage applied to the lateral thermal actuator
- Applocations : Stationary Dielectric on metal (DOM), ESDM,
Questions about this Technology?
Contact For Licensing
sm-marketing@imail.iitm.ac.in
ipoffice2@iitm.ac.in
Research Lab
Prof. Amitava Das Gupta
Prof. Deleep R Nair
Department of Electrical Engineering
Intellectual Property
IITM IDF Ref. 1339
Patent No. 363823
Technology Readiness Level
TRL-4
Proof of Concept ready & validated