Industrial Consultancy & Sponsored Research (IC&SR) , IIT Madras

Method & Apparatus for modifying dimensions of a waveguide

Categories for this Invention

Technology:Apparatus for modifying dimensions of a waveguide;

Industry & Application: Photonic Devices, Optical interconnect devices, Optical Fibre, Semiconductor;

Market: The global optical waveguide market is projected to grow at a CAGR of 13.87% during 2024-2029.

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Problem Statement

  • The challenge associated with small cross-section waveguides are the uniformity over large propagation lengths, core-cladding interface roughness and overall fabrication reproducibility.
  • In the conventional art, the problem arising of the local refractive index trimming techniques cannot modify the dimensions of the waveguide during a design phase.
  • Hence, there is a need to address the issues.
  • Present invention provide the solution in efficient manner by providing the modified dimensions of a waveguide.

Technology

  • Present invention describes a method & apparatus for modifying dimensions of a waveguide.
  • The method comprising a few steps illustrated hereinbelow:

STEP 1

  • Positioning a shadow mask with an aperture above the waveguide fabricated on a substrate.

STEP 2

  • Spatially filtering a substance, by the apparatus through the aperture of the shadow mask on a portion of the waveguide, wherein the substance is a vaporizing material deposited with the portion of the waveguide to modify a cladding of the waveguide; and

STEP 3 

  • Obtaining an adiabatic spot size converter at end of the waveguide, by adjusting a distance between the shadow mask and the portion of the waveguide, to modify the dimensions of the waveguide. (Refer Fig.1)
  • Further the apparatus for modifying dimensions of a waveguide is illustrated herein. (Refer Fig. 2A-2F)
  • The apparatus comprises one of a reactive ion etching system & a deposition system.
  • Further, said apparatus includes a shadow mask which is with an aperture positioned above the waveguide, configured to spatially filter a substance through the aperture in the shadow mask on a portion of the waveguide.
  • Furthermore, an adiabatic spot size converter is obtained at end of the waveguide.

Key Features / Value Proposition

Technical Perspective:

  • The core dimensions are reduced adiabatically.
  • The length of uniformly trimmed waveguide section is controlled by adjusting the length of the shadow mask aperture alone.
  • Provide modified dimensions of waveguide which plays a vital role in terms of light coupling efficiency, effective refractive index, dispersion characteristics, mode-size simultaneously at any desired location of pre-defined single mode silicon-on-insulator (SOI) waveguide.

Industry Perspective:

  • Easily fabricated on a substrate.
  • Applicable both silicon platform & all planar light-wave circuits.

Questions about this Technology?

Contact For Licensing

sm-marketing@imail.iitm.ac.in
ipoffice2@iitm.ac.in

Research Lab

Prof. Bijoy Krishna Das

Department of Electrical Engineering

Intellectual Property

  • IITM IDF Ref. 1301

  • IN Patent No: 469080

  • US Patent No. US10168479 (Granted)

Technology Readiness Level

TRL-4

Proof of Concept ready, tested in lab.

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