Industrial Consultancy & Sponsored Research (IC&SR) , IIT Madras

Asymmetric Phononic Crystal (PnC) Tethering for Radio Frequency (RF) Micro-electro-mechanical System (MEMS) Resonator

Categories for this Invention

Categories: Photonics | Electronics & Circuits | Chemistry & Chemical Analysis

IndustryMEMS Resonators, RF components & Phononic Crystals, Semiconductor & Electronics Manufacturing, Integrated & Standalone Devices

Applications: Wireless Communication Devices, Sensors and Measurement Equipment, 5G, IoT, Telecommunication Infrastructure, Advanced Research Instruments, Automotive, Consumer Electronics, Frequency Control Devices

Market: The MEMS resonator market is expected to grow from $ 2.4 Mn in 2021 to $ 4.9 Mn by 2028, at 8.23% CAGR from 2022 to 2028.

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Problem Statement

  • Current resonators suffer Low Q-Factors and higher insertion losses, due to anchor losses, interfacial dissipation, & material losses in electrodes.
  • Acoustic waves escaping through support tethers reduce the energy retention in resonators, impacting overall performance.
  • Existing symmetric Phononic Crystal (PnC) designs shows a lot of drawbacks, prompting the need for an improved structure to contain acoustic wave leakage effectively.
  • Hence there is a need of this instant patent disclosure to address above mentioned issues.

Technology

The present patent discloses an asymmetric Phononic Crystal (PnC) tethering for Radio Frequency (RF) Micro-electro-mechanical System (MEMS) Resonator, comprises:

  • Two asymmetric unit cells including semicircular inclusions.
  • The center of each semicircular inclusion is displaced from each other by a distance 2d.
  • Each said asymmetric unit cell is repeated in same direction with a lattice constant ‘a’. 
  • The asymmetric unit cells with the lattice constant ‘a’ undergoes elastic waves scattering in the semicircular inclusions.
  • The PnC tethering is attached to a resonator using a tapered connector.

Key Features / Value Proposition

User Perspective:

  • Enhanced Device Performance
  • Stability and Precision & Seamless Connectivity

Industrial Perspective:

  • Competitive Advantage & Cost-Efficiency
  • Reliable Wireless Communication Devices Across Consumer Electronics, Automotive, & Telecommunications Industries.

Technical Perspective:

  • High Q-Factor Improvement
  • Customizable Design with smaller size
  • Integration Potential
  • Effectively addresses anchor losses in MEMS resonators, leading to a significant improvement in the resonator’s Q-Factor.
  • By containing acoustic wave leakage, it retains more energy in resonator, boosting its overall performance.

Questions about this Technology?

Contact For Licensing

sm-marketing@imail.iitm.ac.in
ipoffice2@iitm.ac.in

Research Lab

Prof. Amitava Das Gupta

Prof. Deleep R Nair

Department of Electrical Engineering

Intellectual Property

  • IITM IDF No: 1337 | IP No.: 392423 (Granted)
  • PCT No.: PCT/IN2017/050017

Technology Readiness Level

TRL – 4

Experimentally validated in lab.

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